Print  Close

Design of Local Exhaust Ventilation for Preventive Maintenance in the Semiconductor Industry Using CFD

Abstract No:

1408 

Abstract Type:

Professional Poster 

Authors:

J Hong1

Institutions:

1Samsung Electronics, Hwasung Si, Gyunggi-do

Presenter:

Jwaryung Hong  
Samsung Electronics

Description:

This study is about the design of local exhaust ventilation that can be placed in a semiconductor industry chamber. The designed local exhaust ventilation achieved both convenience and efficiency. Computational fluid dynamics (CFD) simulation can be applied to semiconductor processes to improve the working environments.

Situation / Problem:

Various preventive maintenance (PM) tasks are involved in the semiconductor manufacturing process. To control possible exposure risk to harmful substances, purging is carried out before any task is done. In addition, local exhaust devices are used to minimize exposure from residues or by-products during PM tasks. In attempt to improve the working environment and ensure workers' health protection, a hood for exclusive use in PM was designed and tested on-site. To confirm efficiency as well as least interference of PM operations by the hood, computational fluid dynamics(CFD) simulation was performed.

Methods:

The local exhaust ventilation was designed in a form that can be placed in the metal chamber. The inlet face was different in rectangular and slot hoods. The flow characteristics and capture efficiency of two types of hoods were numerically compared. In order to evaluate efficiency, a metal from group 15 in the periodic table was released at the bottom of the chamber to simulate emissions. CFD commercial code used in this study was Ansys Fluent Ver. 18.1.

Results / Conclusions:

The slot hood was more efficient than the rectangular hood under the same conditions because the slot hood provided a) uniform air flow; b) higher face velocity and c) no rotating swirl in the plenum. With less than 10 slots, the capture efficiencies for contaminants were nearly 95%. The optimum conditions for a hood to achieve high efficiency was 8 to 10 slots and a face velocity over 1 m/s.

Well-designed ventilation systems must be considered for both efficiency and convenience. For this study, a slot hood that had high capture efficiency and no work disturbance was designed. This will contribute to protecting the health of workers who work in a PM area and other areas as well. Also, this study is relevant for confirming the possibility of the application CFD in the semiconductor fabrication industry.

Primary Topic:

Engineering Controls and Ventilation

Secondary Topics:

Safety Management
Technology

Co-Authors

Please add your co-authors below. Co-authors are listed for professional courtesy and will not be communicated with regarding the decision notification or any on-site logistics, if accepted. Only the primary presenter listed is expected to attend and present the content on-site.

Jaehan Koo, Changsup Park, Kwangmin Choi

Acknowledgements and References

List any additional people who worked on the project or provided guidance and support along with details on the role they played in the research. (Please include first name, last name, organization, city, state and country).

None

Practical Application

How will this help advance the science of IH/OH?

This will contribute to protecting the health of workers who work in a PM area and other areas as well in semiconductor industry. Also this kind of hood will be applied similar process besides semiconductor industry.

Learning Level

What learning level is the presentation content geared towards?

Experienced - has a thorough understanding of the content area and work experience including application and evaluation of the content/concepts in a variety of contexts; can vary performance based on unique situations.